Actuators deliver sub-nanometre repeatability
Queensgate Instruments has released a Digital Piezo Translator (DPT) series of actuators that is said to incorporate capacitive sensors to deliver precise positioning and rapid settling. The actuators are suitable for use in applications including interferometry, semiconductor mask-wafer chuck alignment, beam alignment, cavity tuning, adaptive optics, scanning probe microscopy and a multitude of different metrology tasks.
There are two series of DPT, the DPT-D, said to feature best in class positioning performance and the more compact DPT-E which is a low voltage replacement for the previous generation DPT-C series. Air and Ultra High Vacuum variants are available as standard. The actuators are said to feature position resolutions down to 0.09nm and, <2ms response time and 0.5nm repeatability. They are able move loads of up to 60kg across their entire closed loop range, with closed loop ranges from 20 to 110µm.
Among the array of accessories accompanying these actuators are various end pieces, mirror holders and mounting blocks. An operational temperature range of -30 to 80°C is supported as standard, but higher temperature variants can be offered.
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