Gears drive semiconductor bearing robots

Written by: Caroline Hayes | Published:
Harmonic Drive UK has introduced the CSD gears for automation in the semiconductor industry.



Harmonic Drive UK has launched a series of lightweight and compact gears for semiconductor electronics.

The CSD-2UH range has a small outside diameter and offers a torque capacity of 12 to 820Nm and is available in seven sizes in ratios of 50, 100 and 160:1. Another version, the CSD-2UF, has the shortest overall length, claims the company, and offers a torque capacity of 12 to 450Nm in six sizes and the same three ratios.

The CSD Component Set has a heavy duty cross roller bearing for a high payload performance in environments with limited space. It is designed for wafer handling robots used in the semiconductor industry which stack silicon wafers into a cassette tower by accurately detecting wafer presence and position.

The robot calculates the wafer centre to an accuracy of 5000ths of an inch to reduce errors. The gears have a very short overall length and a lightweight design, delivers the required high power to weight ratio, and is available in two variants.

According to the company, the high level of positioning accuracy means the CSD achieves stable machine characteristics and short cycle times. For higher load carrying capacity, the CSD-2UF has an output bearing with a high tilting rigidity and a central hollow shaft with a diameter between 9.0 and 37mm.

The inclusion of a hollow shaft allows cables, shafts, pipes, laser beams and other services to be passed through the centre of the unit.



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