XYZ piezo stages for exceptional 3D positioning accuracy

Written by: Aerotech Inc | Published:

Aerotech´s QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact three-degree-of-freedom (DoF) package.

They come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm). The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation.

Precision Parallel-Kinematic Design
QNP3 piezo stages use an FEA-optimized precision parallel-kinematic flexure and metrology design to ensure superior multi-axis accuracy, high stiffness, and long device life. High stiffness and resonant frequency enable high process throughput and fast closed-loop response.

The patent-pending drive design minimizes X and Y yaw errors while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors.

Sub-Nanometer Performance
QNP3 stages are available with closed or open-loop feedback. The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01%, and single-digit nanometer repeatability.

Ultra-Precision Control
When coupled with Aerotech´s Q-series controllers and drives, QNP3 stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high positioning bandwidth. Advanced software options, such as Dynamic Controls Toolbox and Motion Designer, provide a variety of highly-effective, easy-to-use tools including Iterative Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

Design Options
An optional mounting plate provides direct mounting to English or metric breadboard optical tables. A solid tabletop is also offered. QNP3 piezo stages are available in custom materials, and in vacuum-prepared versions, upon request. For further information, please contact Steve McLane at 412-967-6854 (direct), or via e-mail at smclane@aerotech.com . In addition, the QNP3 series data sheet is available at: https://www.aerotech.com/product-catalog/piezo-nan... PR0417A

About Aerotech - Dedicated to the Science of Motion
Since 1970, Aerotech has designed and manufactured the highest performance motion control, positioning tables/stages, and positioning systems for our customers in industry, government, science, and research institutions around the world. Aerotech's precision motion control products provide the critical performance for today's demanding applications in markets such as medical device and life sciences, semiconductor and flat panel, photonics, automotive, data storage, laser processing, military/aerospace, electronics manufacturing, test, assembly, research and development, and other markets requiring high precision, high throughput motion solutions.


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