High-precision roller bearings, precision-machined surfaces and noncontact direct-drive linear motors driving through the axes' centre-of-stiffness result in a positioning stage with straightness to ±0.5µm and flatness to ±1.25µm.
The PlanarDLA achieves high servo bandwidths while maximising the clear aperture available and keeping the overall height to a minimum. The PlanarDLA is said to enable high-throughput, high-accuracy processing with velocities of 2m/s and 2g accelerations.
The PlanarDLA stages are available with one or two motors per axis and come in three positioning performance options: High-performance -PLUS and –ULTRA, that Aerotech claim enable accuracies and straightness values to ±500nm and orthogonality to 5µrad.
